Authors : Victor Semenovich Zheltuhin, Pavel Sergeevich Solovyev and Violetta Yurevna Chebakova
Abstract: The model of steady High-Frequency Induction (HFI) discharge of the reduced pressure provides the boundary problems for the diffusion equation of charged particles, the equations of heat conduction for electron and atomic-ion gas as well as the system of Maxwell equations describing the electromagnetic field distribution. In this research to solve the boundary value problem of electron balance in HFI discharge, a natural condition is considered where the diffusion flux of particles from the plasma coincides with the drift flux through the Layer of Positive Charge (LPC). It is established that this case is described by the boundary condition of the third kind. The model issues are solved numerically concerning the eigenvalues of the electron density obtaining with the condition as well as the problem with the condition of complete recombination of electrons on the walls of a gas discharge chamber. The effect of these conditions on the maximum value of the electron temperature is demonstrated. The mathematical justification of the maximum value dependence on the electron temperature from the smallest eigenvalue of the electron diffusion issue. We investigate the arising differences in the values of HFI discharge characteristics. It is established that the alleged condition describes the characteristics of the HFI discharge more adequately, in particular, it allows you to assess the discharge capacity more accurately as well as the electron drift velocity near the discharge chamber wall.
Victor Semenovich Zheltuhin, Pavel Sergeevich Solovyev and Violetta Yurevna Chebakova, 2015. Boundary Conditions for Electron Balance Equation in the Stationary High-Frequency Induction Discharges. Research Journal of Applied Sciences, 10: 658-662.